Crystalline In-Ga-Zn Oxide (IGZO) including c-axis aligned crystal (CAAC) enables FETs to show high reliability and extremely low off-state current. CAAC-IGZO technology is expected to grow to main technology of next-generation displays and already contributes to mass-production of liquid crystal displays. On the other hand, we have also focused on a feature, extremely low off-state current, of CAAC-IGZO FETs and realized application of the CAAC-IGZO technology to LSIs as advanced pioneering development. In particular, a success in development of a hybrid process of CMOS FETs and CAAC-IGZO FETs promotes our developments of novel memories, processors, image sensors, and recently, field programmable gate arrays (FPGA). This invited paper reviews application of the CAAC-IGZO technology to these LSIs.