Othman Sidek1, Mohammad Zulfikar Ishak1, Muhammad Afif Khalid1, Mohamad Zailani Abu Bakar2, Muhamad Azman Miskam1
1Collaborative Microelectronic Design Excellence Centre, 2School of Chemical Engineering
Temperature uniformity on a micro-hotplate is important for gas sensor sensitivity, linearity, and resolution. There are several ways to induce a uniform temperature distribution on a micro-hotplate. In this paper, the modification of micro-heater geometry is the method used. Four different heater geometries are simulated using ConvetorWare software to determine which geometry can give the best uniform temperature distribution. The simulation results show that the heater geometry which combines parallel and meander shapes results in the most uniform heat distribution. The electrical potential and current distributions of the four different micro-heater geometries are also evaluated.